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Mechanical and tribological characterization of TiB2 thin films

机译:TiB2薄膜的力学和摩擦学表征

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摘要

Titanium Diboride (TiB2) presents high mechanical and physical properties. Some wear studies were also carried out in order to evaluate its tribological properties. One of the most popular wear tests for thin films is the ball-cratering configuration. This work was focused on the study of the tribological properties of TiB2 thin films using micro-abrasion tests and following the BS EN 1071-6: 2007 standard. Due to high hardness usually patented by these films, diamond was selected as abrasive on micro-abrasion tests. Micro-abrasion wear tests were performed under five different durations, using the same normal load, speed rotation and ball. Films were deposited by unbalanced magnetron sputtering Physical Vapour Deposition (PVD) technique using TiB2 targets. TiB2 films were characterized using different methods as Scanning Electron Microscopy (SEM), Energy Dispersive X-ray Spectroscopy (EDS), Atomic Force Microscopy (AFM), X-ray Diffraction (XRD), Electron Probe Micro-Analyser (EPMA), Ultra Micro Hardness and Scratch-test Analysis, allowing to confirm that TiB2 presents adequate mechanical and physical properties. Ratio between hardness (coating and abrasive particles), wear resistance and wear coefficient were studied, showing that TiB2 films shows excellent properties for tribological applications.
机译:二硼化钛(TiB2)具有很高的机械和物理性能。为了评估其摩擦学性能,还进行了一些磨损研究。薄膜最受欢迎的磨损测试之一是弹坑结构。这项工作的重点是使用微磨损试验并遵循BS EN 1071-6:2007标准研究TiB2薄膜的摩擦学性能。由于这些膜通常具有很高的硬度,因此在微磨蚀测试中选择了金刚石作为磨料。在相同的法向载荷,转速和滚珠作用下,在五个不同的持续时间下进行了微磨损试验。通过不平衡磁控溅射物理气相沉积(PVD)技术使用TiB2靶沉积薄膜。使用扫描电子显微镜(SEM),能量色散X射线光谱仪(EDS),原子力显微镜(AFM),X射线衍射(XRD),电子探针显微分析仪(EPMA),超高光谱法等多种方法对TiB2膜进行表征显微硬度和划痕测试分析,可以确认TiB2具有足够的机械和物理性能。研究了硬度(涂层和磨料颗粒)之间的比率,耐磨性和磨损系数,表明TiB2膜在摩擦学应用中显示出优异的性能。

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